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127. Shaolin Zhou, Yongqi Fu, Xiaoping Tang, Wangfu Chen, Yong Yang, Fourier transformation based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography, Optics Express 16(11), 7869-7880 (26 May 2008).

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Pre One:128. Shaolin Zhou, Song Hu, Yongqi Fu*, Xiangmin Xu, Jun Yang, Moiré interferometry approach with high alignment resolution in proximity photolithographic process, Applied Optics, 53(5), 951–959 (2014).

Next One:126. Xiaochun Dong, Chunlei Du, Shuhong Li, Changtao Wang, Yongqi Fu, Novel control approach for form accuracy of microlenses with continuous relief. Optics Express, 13(5), 1353-1360 (7 March 2005).

Stephen Fu

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