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128. Shaolin Zhou, Song Hu, Yongqi Fu*, Xiangmin Xu, Jun Yang, Moiré interferometry approach with high alignment resolution in proximity photolithographic process, Applied Optics, 53(5), 951–959 (2014).

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Pre One:129. Yongqi Fu, Ngoi Kok Ann Bryan, Experimental study of micro-cylindrical lens by focused ion beam technology. Journal of Vacuum Sciences and Technology B Vol.19, No.4, pp.1259-1263 (July/Aug. 2001).

Next One:127. Shaolin Zhou, Yongqi Fu, Xiaoping Tang, Wangfu Chen, Yong Yang, Fourier transformation based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography, Optics Express 16(11), 7869-7880 (26 May 2008).

Stephen Fu

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Degree:Doctor of Engineering Status:Professor E-Mail:

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