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Paper Publications

160. Z. W. Xu, F. Z. Fang, Yongqi Fu, S. J. Zhang, T. Han, J. M. Li. Fabrication of Micro/Nano Structures using Focused Ion Beam Implantation and XeF2 Gas Assisted Etching. Journal of Micromechanics and Microengineering. 19, 054003 (2009).

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Pre One:161. Z. W. Xu, F. Z. Fang, S. J. Zhang, X. D. Zhang, X. T. Hu, Y. Q. Fu, L. Li, Fabrication of micro DOE using micro tools shaped with focused ion beam, Optics Express, 18(8), 8025-8032 (2010).

Stephen Fu

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