Batch Production of single-crystal diamond brideges and cantilevers for microelectromechanical systems
点击次数:
备注:Joural of Micromechanics and Microengineering, 20, 085002, 2010.
全部作者:Y. Koide, S. Hishita, C.Li,M. Liao
是否译文:否
点击次数:
备注:Joural of Micromechanics and Microengineering, 20, 085002, 2010.
全部作者:Y. Koide, S. Hishita, C.Li,M. Liao
是否译文:否