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Molybdenum thin films with low resistivity and superior adhesion deposited by radio-frequency magnetron sputtering at elevated temperature

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Note:Thin Solid Films 567 (2014) 64-71.

All the Authors:J.Z. Li, J. Xu, Y. Wang, L.D. Feng, A.J. Zhou*,X.Y. Dai

Translation or Not:no

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Zhou Aijun

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Degree:Doctor of Engineering Status:Professor E-Mail:

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