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Improving the dynamic performance of capacitive micro‑accelerometer through electrical damping

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Journal:Microsyst. Technol.

All the Authors:Huijun Yu,Jian Zeng,Zhi Zeng,Xiaoping He,Yang Liu

First Author:Wu Zhou

Correspondence Author:Bei Peng

Volume:2016

Issue:22

Page Number:2961–2969

Translation or Not:no

Date of Publication:2015-10-15

Date of Publication:2015-10-15

Pre One:Analytical study and compensation for temperature drifts of a bulksilicon MEMS capacitive accelerometer

Next One:Air Damping Analysis in Comb Microaccelerometer

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:Professor School/Department:University of Electronic Science and Technology of China E-Mail:

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