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Analytical study of temperature coefficients of bulk MEMS capacitiveaccelerometers operating in closed-loop mode

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Journal:Sensors and Actuators A: Physical

All the Authors:Huijun Yu,Xiaoping He,Peng Peng

First Author:Wu Zhou

Correspondence Author:Jiangbo He*

Volume:290

Page Number:239–247

Translation or Not:no

Date of Publication:2019-03-22

Date of Publication:2019-03-22

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周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:Professor School/Department:University of Electronic Science and Technology of China E-Mail:

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