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Improved MEMS piezoelectric vibratory stage with reduced off-axis error

2022-12-28 Hits:

Journal:J. Micro/Nanolith. MEMS MOEMS

All the Authors:Bei Peng,Huijun Yu,Hu Zhao

First Author:Rui Hao

Correspondence Author:Wu Zhou*

Document Code:015002

Volume:19

Issue:1

Translation or Not:no

Date of Publication:2020-02-21

Date of Publication:2020-02-21

Pre One:A novel three-dimensional contact model of piezoelectric traveling wave ultrasonic micromotor

Next One:Interfacial Stress Prediction of Tri-layer Packaging with Void in Adhesive

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:Professor School/Department:University of Electronic Science and Technology of China E-Mail:

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