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A High-Resolution Optical Displacement Detection Method for Piezoelectric Microvibratory Stage

2022-12-28 Hits:

Journal:IEEE Transactions on Industrial Electronics

All the Authors:Longqi Ran,Huijun Yu,Bei Peng,Rui Hao

First Author:Haixiang Zhan

Correspondence Author:Wu Zhou*

Volume:67

Issue:12

Page Number:10897-10904

Translation or Not:no

Date of Publication:2020-12-16

Date of Publication:2020-12-16

Pre One:考虑横向灵敏度的三轴加速度传感器标定方法研究

Next One:Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:Professor School/Department:University of Electronic Science and Technology of China E-Mail:

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