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微机电系统压电振动台迟滞补偿方法研究

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Journal:中国机械工程

All the Authors:彭倍

First Author:郝瑞

Correspondence Author:周吴*

Volume:32

Issue:17

Page Number:2118-2124

Translation or Not:no

Date of Publication:2021-09-16

Date of Publication:2021-09-16

Pre One:存在初始位移的MEMS 振动台的振动特性分析

Next One:Drift of MEMS Closed-Loop Accelerometers Induced by Dielectric Charging

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:Professor School/Department:University of Electronic Science and Technology of China E-Mail:

Recommended Ph.D.Supervisor 》

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