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Traveling wave distortion of MEMS ultrasonic motor induced by anisotropic elasticity

2023-01-01 Hits:

Journal:Mechanical Systems and Signal Processing

All the Authors:Jiangbo He,Yu Chen,Binlei Cao,Xiaoshi Li,Tianyu Yang,Zongda Hu,Longqi Ran

Correspondence Author:Wu Zhou*

Document Code:110083

Volume:189

Page Number:110083(15 pages)

Translation or Not:no

Date of Publication:2023-01-01

Date of Publication:2023-01-01

Attachments:

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Next One:Drift of MEMS Capacitive Accelerometers for One-Year Room-Temperature Storage: A Simulation and Experimental Study

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:Professor School/Department:University of Electronic Science and Technology of China E-Mail:

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