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MEMS Air-Damped Isolator for Dual-Axis Micromirrors Broad-Range Frequency Vibration Isolation (JMEMS Right Now Paper)
2025-09-15 Hits:Journal:Journal of Microelectromechanical Systems
Note:入选JMEMS Right Now Paper!
All the Authors:Jiahao Wu,Yan Wang,Xuhui Gong
First Author:Longqi Ran
Correspondence Author:Wu Zhou*,Jiangbo He*
Volume:34
Issue:3
Page Number:260-267
Translation or Not:no
Date of Publication:2025-06-05
Date of Publication:2025-06-05