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一种光学位移检测传感器组件
2022-12-28 Hits:Affilication of Author(s):电子科技大学
Patent Coverage:发明专利
School Sign:第一
Patent desc:用于检测微板平移与转动
Type of Patent:发明专利
State of Patent:授权
Authorization number:ZL201910490502.X
Number of Inventors:5
Service Invention or Not:no
Authorization Date:2020-09-01
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